Diamond/aluminium nitride composites for efficient thermal management applications

Abstract

Synthetic diamond/AlN composite materials have been fabricated by a combination of microwave plasma-assisted chemical vapor deposition and molecular beam epitaxy. These wide band gap semiconductor heterojunctions show promises for many applications, including thermal management, deep ultraviolet light emitting devices, and high power and high temperature electronics. Here, we report results of an interface study of polycrystalline diamond layers grown on single crystal AlN(0001). High resolution transmission microscopy revealed atomically sharp interfaces between diamond and AlN. Temperature dependent Raman spectroscopy measurements showed reduced thermal resistance on diamond-coated AlN sub..